The effect of r.f. substrate bias on the properties of carbon nitride films produced by an inductively coupled plasma chemical vapor deposition

It was found that nitrogen content of films were in the range of 13.5-21.4 at.%, decreased with increasing bias voltage. As the bias voltage was increased, the deposition rate decreased due to resputtering and the substrate temperature increased as a result of the energetic ions. The film hardness increased with increasing bias voltage up to 30 GPa at −60 V. The results from Raman and XPS analyses showed that the amount of sp3 CC or sp3 CN bonds increased with increasing bias voltage, while the number of the CH, NH and sp2 CN bonds decreased.