3D force components measurement in AFM scratching tests

The demand for enhancing the prospects in the application of AFM in nano tribology and nano machining has made it necessary to measure 3D force components in the AFM scratching tests. Based on B. Bhushan's calibration method for AFM, a modified calibration method to measure 3D force components is proposed by using the optical lever detection method and a high precision stage. The method is further verified through friction coefficient measurement between the sapphire and a diamond tip. Using a micro machining system combining AFM and the high accuracy stage, forces in scratching a single line are measured. The method for force data collecting and processing is also given. This method can be applied in the cutting force measurement using AFM cantilever to perform nano machining or nano tribology tests.