کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9817548 1518767 2005 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Implant isolation of InP by nitrogen irradiation: Effect of dose, initial carrier concentration and implantation temperature
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Implant isolation of InP by nitrogen irradiation: Effect of dose, initial carrier concentration and implantation temperature
چکیده انگلیسی
In this work, 4 MeV N+ was implanted into n-type InP layers at 77 K and room temperature (RT) to obtain high-resistivity regions. The influence of dose and initial carrier concentration of the doped layer on the isolation process is investigated. A maximum sheet resistance of 5 × 106, 1 × 106 and 7.9 × 105 Ω/sq is obtained for samples of initial carrier concentration 4 × 1017, 4 × 1018 and 1 × 1019 cm−3 respectively. It is found that the threshold dose to convert the n-type InP layer into a highly resistive one is linearly dependent on its initial carrier concentration. The threshold dose, defined as the dose at which maximum sheet resistance is obtained, shifts towards higher values with increasing initial carrier concentration.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 240, Issues 1–2, October 2005, Pages 178-182
نویسندگان
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