Atomic layer deposited ZnO films implanted with Yb: The influence of Yb location on optical and electrical properties
Keywords: 61.72.Vv; 61.85. + p; 78.55.Et; 78.66.Hf; 81.15.Gh; Zinc oxide; Ion implantation; Rare-earth; Ytterbium; Rutherford backscattering; Photoluminescence;