Effects of 120 keV nitrogen and its fluence on the structural, electrical, and optical properties of ZnO film

P-type ZnO film was obtained by N-implantation at energy of 120 keV with annealing at 850 °C in oxygen. Room temperature Hall effect measurements revealed that the carrier concentration and mobility was 9.95 × 1018 cm−3 and 14.3 cm2/vs, respectively, in the implanted ZnO with optimal fluence of 1015 N/cm2, where more N acceptors were activated as confirmed by X-ray diffraction and photoluminescence. The increase of lattice constants and appearance of emission peaks at 3.26 and 3.18 eV after implantation indicated that the p-type ZnO was realized by substitution of N atom for O sublattice.