کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9817992 | 1518773 | 2005 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Observation of surface modification and secondary particle emission in HCI-surface interaction
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We have observed secondary particle emission in collision of HCI with Si and HOPG surfaces. For HOPG, we have measured the number of secondary electrons and the number of dot structures on the surface as the imprint of the incidence by STM. The single ion impact is surely observable with almost 100% efficiency by detecting an event of the secondary electron emission. For hydrogen terminated Si(1Â 1Â 1), H+, H2+, H3+, C+ and Si+ ions have been detected. The proton sputtering yield, which depends on the charge of HCI, has been examined.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 235, Issues 1â4, July 2005, Pages 456-459
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 235, Issues 1â4, July 2005, Pages 456-459
نویسندگان
Satoshi Takahashi, Masahide Tona, Kazuo Nagata, Nobuo Yoshiyasu, Nobuyuki Nakamura, Makoto Sakurai, Chikashi Yamada, Shunsuke Ohtani,