کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9818119 1518776 2005 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Secondary ion emission from solid surfaces irradiated with highly charged ions
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Secondary ion emission from solid surfaces irradiated with highly charged ions
چکیده انگلیسی
We have observed positive secondary ion mass spectra from highly oriented pyrolytic graphite (HOPG) and hydrogen terminated Si (Si-H) surfaces irradiated with highly charged ions (HCIs). In the spectra from HOPG irradiated by HCIs of Xeq+, carbon clusters up to C5+ were observed in addition to hydrogenated carbon cluster peaks. On the other hand, in the spectra from the Si(1 1 1)-H, peaks of H+ and H2+ were detected dominantly with weak signals for C+ and Si+. Strong dependence of peak intensities of these spectra on q were also observed. It is shown that sputtering phenomena are closely related to deposition of potential energy of HCIs onto the surfaces and the HCI-probe can be applied to the high sensitivity surface analysis.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 232, Issues 1–4, May 2005, Pages 249-253
نویسندگان
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