کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9818119 | 1518776 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Secondary ion emission from solid surfaces irradiated with highly charged ions
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
We have observed positive secondary ion mass spectra from highly oriented pyrolytic graphite (HOPG) and hydrogen terminated Si (Si-H) surfaces irradiated with highly charged ions (HCIs). In the spectra from HOPG irradiated by HCIs of Xeq+, carbon clusters up to C5+ were observed in addition to hydrogenated carbon cluster peaks. On the other hand, in the spectra from the Si(1Â 1Â 1)-H, peaks of H+ and H2+ were detected dominantly with weak signals for C+ and Si+. Strong dependence of peak intensities of these spectra on q were also observed. It is shown that sputtering phenomena are closely related to deposition of potential energy of HCIs onto the surfaces and the HCI-probe can be applied to the high sensitivity surface analysis.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 232, Issues 1â4, May 2005, Pages 249-253
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 232, Issues 1â4, May 2005, Pages 249-253
نویسندگان
Masahide Tona, Kazuo Nagata, Satoshi Takahashi, Nobuyuki Nakamura, Nobuo Yoshiyasu, Makoto Sakurai, Chikashi Yamada, Shunsuke Ohtani,