کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9818140 | 1518776 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Three-dimensional high-performance nano-tools fabricated using focused-ion-beam chemical-vapor-deposition
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
High performance nano-tools are very important for nano-scale operations and analysis in various researches. To achieve best performance, tools should be made as three-dimensional (3-D) nano-structured devices. Therefore, we have fabricated 3-D nano-tools by using focused-ion-beam chemical-vapor-deposition (FIB-CVD). Most recently, we used FIB-CVD to fabricate a novel 3-D nano-tool, a nano-net. Using this nano-net, we successfully captured polystyrene microspheres (diameter: 2.0 μm).
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 232, Issues 1â4, May 2005, Pages 362-366
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 232, Issues 1â4, May 2005, Pages 362-366
نویسندگان
Reo Kometani, Takayuki Hoshino, Kazuhiro Kanda, Yuichi Haruyama, Takashi Kaito, Jun-ichi Fujita, Masahiko Ishida, Yukinori Ochiai, Shinji Matsui,