کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9818434 | 1518780 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Ion sputtering at grazing incidence for SIMS-analysis
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
The angular distributions of sputtered atoms at large angle oblique and grazing incidence of the primary ion beam in SIMS-analysis have been simulated. They exhibit distinct arc-like areas of an enhanced sputtering yield in the spherical angular distributions, especially at grazing incidence angles of about 80° from the normal. These arc-like maxima are formed by particles knocked-out from the target as a result of single collisions between primary ions and target atoms. A possibility to use sputtered particles taken only from angles around those arc-like maxima in the angular distribution of sputtered particles for SIMS-analysis and the depth-resolution of the SIMS-analysis for different sputtering conditions was investigated by means of Monte-Carlo simulations.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 228, Issues 1â4, January 2005, Pages 373-377
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 228, Issues 1â4, January 2005, Pages 373-377
نویسندگان
M. Ullrich, A. Burenkov, H. Ryssel,