کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9821651 1518988 2005 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Dissociation of nitrogen in the plasma-cathode interface of glow discharges
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Dissociation of nitrogen in the plasma-cathode interface of glow discharges
چکیده انگلیسی
Nitrogen dissociation in the cathode region of glow discharges was studied theoretically by Monte-Carlo simulation and experimentally by optical emission actionometry of lines emitted by atomic and molecular species of this region plasma. In the ranges 0.13-1.3 hPa and 0-0.5 mA/cm2 of gas pressure and current density, dissociation rates of the negative glow plasma seem to be low at the level <1×10−3. In the region close to the cathode these rates are two orders of magnitude higher than that observed in the negative glow. Fast particles (ions and neutrals) impact on the cathode surface seems to be a main source of free atoms here.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 78, Issues 2–4, 30 May 2005, Pages 641-647
نویسندگان
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