Fabrication of vacuum tube arrays with a sub-micron dimension using anodic aluminum oxide nano-templates Fulltext Access 6 Pages 2005
Study of PECVD SiOxNy films dielectric properties with different nitrogen concentration utilizing MOS capacitors Fulltext Access 6 Pages 2005
Application of the Taguchi's design of experiments to optimize a bromine chemistry-based etching recipe for deep silicon trenches Fulltext Access 6 Pages 2005
Oxygen pressure dependence of physical and electrical properties of LaAlO3 gate dielectric Fulltext Access 6 Pages 2005
Simultaneous suppression of overlap errors and side-lobes in attenuated PSM lithography by rule-based OPC Fulltext Access 6 Pages 2005
Development of impedance biosensors with nanometer gaps for marker-free analytical measurements Fulltext Access 6 Pages 2005
Silicon-containing copolymers of MMA tested for a positive-tone high-resolution bi-layer e-beam resist system Fulltext Access 6 Pages 2005
Three-dimensional simulation of resist pattern deformation by surface tension at the drying process Fulltext Access 6 Pages 2005
Simplified resist models for efficient simulation of contact holes and line ends Fulltext Access 6 Pages 2005
A single layer negative tone lift-off photo resist for patterning a magnetron sputtered Ti/Pt/Au contact system and for solder bumps Fulltext Access 6 Pages 2005
Influence of the oxidation in the metal silicide/Si3N4 interfaces on the etching profile Fulltext Access 6 Pages 2005
Fabrication of two-dimensional hybrid photonic crystals utilizing electron beam lithography Fulltext Access 6 Pages 2005
Growth and characterisation of birefringent films on textured silicon substrates Fulltext Access 6 Pages 2005
Evaluation of intrinsic film stress distributions from induced substrate deformation Fulltext Access 6 Pages 2005
A single-step process for making nanofluidic channels using electron beam lithography Fulltext Access 6 Pages 2005
Fabrication of patterned magnetic nanodots by laser interference lithography Fulltext Access 6 Pages 2005
Surface mass spectrometric analysis of SiCl4/SiF4/O2 dry etch gate recessed 120Â nm T-gate GaAs pHEMTs Fulltext Access 6 Pages 2005
Double-island single-electron transistor operated at radio-frequency for sensitive and fast charge detection Fulltext Access 6 Pages 2005
Identifying contributions of individual layers constituting multilayer dielectric mirrors Fulltext Access 6 Pages 2005
The study of chromatic dispersion and chromatic dispersion slope of WI- and WII-type triple-clad single-mode fibers Fulltext Access 6 Pages 2005
Characterization of laser-diode end-pumped intracavity frequency doubled, passively Q-switched and mode-locked Nd:YVO4 laser Fulltext Access 6 Pages 2005
1.55-μm InGaAs/InGaAlAs MQW vertical-cavity surface-emitting lasers with InGaAlAs/InP distributed Bragg reflectors Fulltext Access 6 Pages 2005
Effect of polarization on femtosecond pulsed laser ablation of surface relief gratings using a novel interferometer Fulltext Access 6 Pages 2005
Beam overlapping in a multipass Ti:sapphire amplifier based on a parabolic mirror Fulltext Access 6 Pages 2005
Effects of powder concentration distribution on fabrication of thin-wall parts in coaxial laser cladding Fulltext Access 6 Pages 2005
Preparation and optical constants of the nano-crystal and polymer composite Bi4Ti3O12/PMMA thin films Fulltext Access 6 Pages 2005
Real-time precision displacement measurement interferometer using the robust discrete time Kalman filter Fulltext Access 6 Pages 2005
Electron beam lithography for nanometer-scale planar double-gate transistors Fulltext Access 6 Pages 2005
Electro-optic measurement system with high spatial resolution utilizing poled polymer film as external probe tip Fulltext Access 6 Pages 2005
Theoretical and experimental study of a laser-diode-pumped actively Q-switched Nd:YVO4 laser with acoustic-optic modulator Fulltext Access 6 Pages 2005
Deflectometer with synthetically generated reference circle for aspheric surface testing Fulltext Access 6 Pages 2005
Sol-gel based anti-reflection coatings on wedged laser rods using a spin coater Fulltext Access 6 Pages 2005
Effect of the spectral half-width of the driving field on the bistability Fulltext Access 6 Pages 2005
Studies of Ti- and Ni-germanide Schottky contacts on n-Ge(1Â 0Â 0) substrates Fulltext Access 6 Pages 2005
Full wafer scale near zero residual nano-imprinting lithography using UV curable monomer solution Fulltext Access 6 Pages 2005
A new charge-trapping nonvolatile memory based on the re-oxidized nitrous oxide Fulltext Access 6 Pages 2005
Evaluation of lead-free SnAg solder ball deposition and reflow processes for flip chip applications Fulltext Access 6 Pages 2005
Effect of substrate metallization on mechanical properties of Sn-3.5Ag BGA solder joints with multiple reflows Fulltext Access 6 Pages 2005
Wide band frequency and in situ characterization of high permittivity insulators (high-k) for high-speed integrated passives Fulltext Access 6 Pages 2005
Fabrication and characterization of buried silicide layers on SOI substrates for BICMOS-applications Fulltext Access 6 Pages 2005
Study of plasma mechanisms of hybrid a-SiOC:H low-k film deposition from decamethylcyclopentasiloxane and cyclohexene oxide Fulltext Access 6 Pages 2005
Scaling down thickness of ULK materials for 65Â nm node and below and its effect on electrical performance Fulltext Access 6 Pages 2005
The current limits of the laser-acoustic test method to characterize low-k films Fulltext Access 6 Pages 2005
Investigation of high performance Ta-Si-N/Cu/Ta-Si-N metallization system for SAW devices Fulltext Access 6 Pages 2005
Influence of the sidewall diffusion barrier on the transport properties of advanced Cu/low-k interconnects Fulltext Access 6 Pages 2005
Potential of air gap technology by selective ozone/TEOS deposition: Effects of air gap geometry on the dielectric constant Fulltext Access 6 Pages 2005
Investigation of a Ta-Si-O/Ta-Si-N bilayer system for embedded SAW finger structures Fulltext Access 6 Pages 2005
Electrical and morphological change of Ag-Ni films by annealing in vacuum Fulltext Access 6 Pages 2005
Investigations of titanium nitride as metal gate material, elaborated by metal organic atomic layer deposition using TDMAT and NH3 Fulltext Access 6 Pages 2005
Atomic vapor deposition of Ru and RuO2 thin film layers for electrode applications Fulltext Access 6 Pages 2005
The electronic and atomic structure of SrTiO3, BaTiO3, and PbTiO3(0Â 0Â 1) surfaces: Ab initio DFT/HF hybrid calculations Fulltext Access 6 Pages 2005
Geometry dependence of the energy levels in silicon isolated double quantum-dots Fulltext Access 6 Pages 2005
Investigation of the bond strength between the photo-sensitive polymer SU-8 and gold Fulltext Access 6 Pages 2005
Characterization of pneumatically activated microvalves by measuring electrical conductance Fulltext Access 6 Pages 2005
Dry release fabrication and testing of SiC electrostatic cantilever actuators Fulltext Access 6 Pages 2005
Microfabricated textured surfaces for super-hydrophobicity investigations Fulltext Access 6 Pages 2005
Topside release of atomic force microscopy probes with molded diamond tips Fulltext Access 6 Pages 2005
Ab-initio simulations on growth and interface properties of epitaxial oxides on silicon Fulltext Access 6 Pages 2005
Application of high-κ gate dielectrics and metal gate electrodes to enable silicon and non-silicon logic nanotechnology Fulltext Access 6 Pages 2005
Binding energy calculation of excitonic trions in spherical quantum dots with the quantum adiabatic theorem Fulltext Access 6 Pages 2005
Optimization of Schottky barrier carbon nanotube field effect transistors Fulltext Access 6 Pages 2005
Epitaxial nanostructures assembled on InSb(0Â 0Â 1) by submonolayer deposition of gold Fulltext Access 6 Pages 2005
Magnetic field induced optical variation in nanosize iron oxide fluid-particles Fulltext Access 6 Pages 2005
Stability of information stored in nanoscopic arrays of ferromagnetic posts Fulltext Access 6 Pages 2005
Dark current characteristics of thermally treated contacts on GaN-based ultraviolet photodetectors Fulltext Access 6 Pages 2005
Effects of conditioning temperature on polishing pad for oxide chemical mechanical polishing process Fulltext Access 6 Pages 2005
Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivity Fulltext Access 6 Pages 2005
The effect of tungsten and boron on the Cu barrier and oxidation properties of thin electroless cobalt-tungsten-boron films Fulltext Access 6 Pages 2005