
Stopping cross sections of atomic layer deposited Al2O3 and Ta2O5 and of Si3N4 for 12C, 16O, 35Cl, 79Br and 127I ions
Keywords: Stopping cross section; Al2O3; Ta2O5; Si3N4; Heavy-ions; 12C; 16O; 35Cl; 79Br; 127I; ALD; TOF-ERDA;