Stopping cross sections of atomic layer deposited Al2O3 and Ta2O5 and of Si3N4 for 12C, 16O, 35Cl, 79Br and 127I ions

Stopping cross sections of atomic layer deposited Al2O3 and Ta2O5 and of Si3N4 for 0.03-1 MeV/u 12C, 16O, 35Cl, 79Br and 127I ions have been measured by the transmission technique employing a Time of Flight-Elastic Recoil Detection Analysis (ToF-ERDA) setup. Simulation of experimental slowing down energy spectra was employed to obtain stopping cross section curves over a continuous energy range. The experimental results are compared with the predictions of the SRIM2012 parameterization and literature data.