
Columnar growth of ALN by r.f. magnetron sputtering: Role of the {1 0 1¯ 3} planes
Keywords: B2 مواد پیزوالکتریک; 81.10.A; 81.15.C; 73.61.JA1. Crystal morphology; A1. Growth models; A1. Nanostructures; A3. Physical vapor deposition processes; B1. Nitrides; B2. Piezoelectric materials