
Growth by MOCVD of In(Ga)AlN alloys, and a study of gallium contamination in these layers under nitrogen and hydrogen carrier gas
Keywords: A3. Metalorganic chemical vapor deposition; B2. Semiconducting ternary compounds; B2. Semiconducting indium compounds; B2. Semiconducting quarternary alloys; B1. Nitrides; A1. Atomic force microscopy;