
Microstructure, optical and electrical properties of nitrogen doped sp2-rich a-C thin films grown by facing-target magnetron sputtering
Keywords: خواص الکتریکی; 81.15.Cd; 61.43.Dq; 81.05.Uw; 78.66.Jg; 73.61.Jc; 71.55.Jv; Magnetron sputtering; Amorphous carbon nitride; Optical properties; Electrical properties; Defects;