Photoresists comparative analysis using soft X-ray synchrotron radiation and time-of-flight mass spectrometry
Keywords: فوتون جذب یون را تحریک می کند; 42.70.jk; 42.70.Gi; 82.20.-w; 82.50.Hp; 82.80.Rt; 33.80.-bPhotoresists; Photodegradation; Photon stimulated ion desorption; Positive ions; Time-of-flight mass spectrometry; NEXAFS