کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5205082 | 1381982 | 2007 | 6 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: AZ-1518 Photoresist analysis with synchrotron radiation using high-resolution time-of-flight mass spectrometry AZ-1518 Photoresist analysis with synchrotron radiation using high-resolution time-of-flight mass spectrometry](/preview/png/5205082.png)
With the aim of identifying molecular modifications among photoresists unexposed and previously exposed to the ultraviolet light the photon stimulated ion desorption (PSID) technique was employed in the study of the AZ-1518 photoresist. Data acquisition was performed at the Brazilian Synchrotron Light Source (LNLS), during a single-bunch operation mode of the storage ring and using high-resolution time-of-flight mass spectrometry (TOF-MS) for ion analysis. PSID mass spectra on both photoresists (unexposed and exposed) were obtained following the S K-shell photoexcitation and desorption ion yield curves have been determined for the main fragments as a function of the photon energy. The AZ-1518 photoresists presented different PSID spectra, showing characteristic fragments. Most of the analyzed ions showed larger relative yields for the exposed photoresist. Fragments related to the photochemical decomposition of the photoresist could be clearly identified. These results showed that the PSID technique is adequate to investigate structural changes in molecular level in unexposed and exposed photoresists.
Journal: Polymer Degradation and Stability - Volume 92, Issue 6, June 2007, Pages 933-938