
Structural changes of Si surfaces by nitrogen implantation using plasma based ion implantation
Keywords: اصلاح سطح; 52.77.Dq; 78.30.âj; 81.65.Lp; 61.43.âj; 68.47.Fg; Plasma based ion implantation; Surface modification; EDX; Raman spectroscopy; FT-IR; SiNx;