کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10401019 891136 2005 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Synthesis and characterization of superhard aluminum carbonitride thin films
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Synthesis and characterization of superhard aluminum carbonitride thin films
چکیده انگلیسی
Oxygen-free aluminum carbonitride thin films were grown on Si (100) substrates by reactive magnetron sputtering of Al target with the gas mixture of Ar, CH4 and N2 as precursor. A complementary set of techniques including X-ray photoelectron spectroscopy, energy-dispersive X-ray spectrometry, X-ray diffraction, transmission electron microscopy and atomic force microscopy was employed for the characterization of the deposit chemistry, structure as well as morphology. Film growth proceeds along the preferred [0001] direction with the basal planes twisted because of the frustration in arranging the building blocks for aluminum carbonitrides. Under given conditions, the deposits show a declining tendency of crystallization with increasing carbon content. Strong covalent bonding and structural disorder give the film's extreme mechanical rigidity: Berkovich hardness is over 27.0 GPa for all the deposits, and an extreme value of 53.4 GPa was measured in Al47C20N33.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 14, Issue 8, August 2005, Pages 1348-1352
نویسندگان
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