کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10401219 | 891166 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Thermal stability of metal-doped diamond-like carbon fabricated by dual plasma deposition
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
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چکیده انگلیسی
Metal incorporation into amorphous diamond-like carbon films can provide superior properties as metal nano-clusters or nanocrystalline metallic carbides can be embedded in the carbon network. In this work, a filtered metal plasma cathodic arc technique is used to generate a metal plasma and acetylene is introduced to the metal plasma plume to deposit metal-containing DLC (Me-DLC) films and form nanocrystalline carbide phases in the amorphous carbon matrix. The films exhibit high thermal stability up to annealing temperatures of 500 °C as revealed by X-ray diffraction, transmission electron microscopy, and Raman spectroscopy. At treatment temperature over 500 °C, a large amount of hydrogen is lost from the Me-DLC films as shown by elastic recoil detection. Breakdown and structural collapse of the film at high temperature can be attributed to the breaking of C-H bonds. Consequently, the C-C networks become more graphite-like to facilitate the formation of volatile C-O and metal oxides phases.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 14, Issue 9, September 2005, Pages 1489-1493
Journal: Diamond and Related Materials - Volume 14, Issue 9, September 2005, Pages 1489-1493
نویسندگان
Ricky K.Y. Fu, Y.F. Mei, M.Y. Fu, X.Y. Liu, Paul K. Chu,