Acoustic wave based MEMS devices for biosensing applications

► Acoustic wave MEMS biosensors are simple and portable in compared to fluorescent microscopy and SPR. ► FBARs, SAW and Love-wave biosensors are highly sensitive in both dry and liquid environments. ► Shear mode FBARs can maintain high Q during the operation in liquid making best suited as biosensors. ► Each FBAR in a biosensor array can be functionalized separately to detect different analytes. ► Simple fabrication methods can be used to integrate Si FBAR biosensor with readout circuitry.