Resonance acoustic microbalance with naked-embedded quartz (RAMNE-Q) biosensor fabricated by microelectromechanical-system process

► We developed 178-MHz wireless-electrodeless QCM biosensor by MEMS process. ► Its Q value is 1500 at 170 MHz and frequency stability is less than 2 ppm. ► A new antenna configuration is proposed for noncontacting measurement of resonance frequency. ► It achieves tenfold increase in the transduction efficiency. ► MEMS QCM biosensor detects 1 ng/ml IgG.