The impact of etching during microfabrication on the microstructure and the electrical conductivity of gadolinia-doped ceria thin films

► Gadolinia doped ceria (CGO) thin films deposited by spray pyrolysis and annealed to different degree of crystallinity. ► Microstructure and electrical conductivity very resistant against typical etching used in microfabrication. ► The more crystalline the thin films, the more resistant the films. ► Conductivity of 95% crystalline CGO thin films not changed due to etching.