کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10610530 985980 2005 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Carbon spheres generated in 'dusty plasmas'
موضوعات مرتبط
مهندسی و علوم پایه مهندسی انرژی انرژی (عمومی)
پیش نمایش صفحه اول مقاله
Carbon spheres generated in 'dusty plasmas'
چکیده انگلیسی
The formation of spherical hydrogenated amorphous carbon (a-C:H) particulates generated in a radio frequency plasma enhanced chemical vapour deposition (rf-PECVD) system is reported. These particulates appear as a white powder-no other contaminants appear to be present. electron energy loss spectroscopy (EELS) shows characteristics typical of a-C:H with a reduced plasmon energy due to hydrogen incorporation. Raman spectroscopy however revealed a 1456 cm−1 line which was previously not reported on a-C:H films deposited using similar processes. Infrared (IR) spectroscopy shows that these spheres are mainly partially oxidised, methyl-rich, aliphatic hydrocarbons.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Carbon - Volume 43, Issue 4, 2005, Pages 704-708
نویسندگان
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