کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10624883 | 989612 | 2014 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Photonic curing of sol-gel derived HfO2 dielectrics for organic field-effect transistors
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Photonic curing of sol-gel derived HfO2 dielectrics for organic field-effect transistors Photonic curing of sol-gel derived HfO2 dielectrics for organic field-effect transistors](/preview/png/10624883.png)
چکیده انگلیسی
An efficient way to reduce the supply voltages of organic field-effect transistors is the use of high-k inorganic materials. In order to allow high throughput during fabrication, solution-based processes for realizing inorganic dielectrics by using sol-gel procedures have become attractive in recent years. However, this procedure typically involves extended high-temperature annealing steps to achieve high-quality insulating layers which hampers fast fabrication and is incompatible to be carried out on low-temperature organic substrates. In this work, the use of a photonic curing technique is presented for the annealing of sol-gel derived hafnium oxide (HfO2) dielectrics within a few seconds. The investigations demonstrate the reduction of the leakage current density of more than 3 orders of magnitude after the photonic curing process reaching only slightly higher values as obtained with dielectric films formed from highly sophisticated atomic layer deposition. Moreover, capacitance measurements reveal a dielectric constant of 26 indicating bulk-like properties. Furthermore, organic transistors based on photonically cured HfO2 sol-gel dielectrics are fabricated and characterized operating at low voltages (<2Â V), low subthreshold swing (110Â mV/decade) and charge carrier mobilities of 1Â cm2/Vs using a semiconducting liquid-crystal polymer.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ceramics International - Volume 40, Issue 10, Part A, December 2014, Pages 15753-15761
Journal: Ceramics International - Volume 40, Issue 10, Part A, December 2014, Pages 15753-15761
نویسندگان
Kornelius Tetzner, Kurt A. Schroder, Karlheinz Bock,