کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10634091 993331 2010 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Strength distribution of single-crystal silicon theta-like specimens
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Strength distribution of single-crystal silicon theta-like specimens
چکیده انگلیسی
A new test specimen was developed for micro-scale tensile strength measurements, allowing direct assessment of surface effects on strength. Specimens were formed by deep reactive ion etching, tested with instrumented indentation, and test results interpreted using finite element analyses. Fracture strengths as great as 3 GPa were observed, with fracture initiating at processing-induced flaws and propagating along {1 1 1} and {1 1 0} planes.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Scripta Materialia - Volume 63, Issue 4, August 2010, Pages 422-425
نویسندگان
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