Infrared studies of the oxygen precipitation in fast neutron irradiated CZ-Si

The behavior of oxygen precipitation in fast neutron irradiated CZ-Si was studied using Fourier transform infrared absorption spectrometer (FTIR). It was found that with the increase of irradiation dose the process of oxygen precipitation was accelerated. Measured at room temperature (RT), the absorption band attributed to interstitial oxygen was broadened because of the generation of oxygen precipitates. At low temperature, the broadened band split to oxygen precipitates related peaks at 1078 and 1096 cm−1 that attributed to spherical-like oxygen precipitates and octahedral shaped oxygen precipitates, respectively. There is a peak at 1182 cm−1, which attributed to the platelet shaped oxygen precipitates, but it is weaker than 1078 cm−1 peak and 1096 cm−1 peak.