Reliability of the CFTM and GPA methods for strain analysis at ultra-thin layers

▶ We evaluate the reliability of the CFTM and GPA methods for strain analysis. ▶ The leakage effect generates error when these methods are applied at ultra-thin layers. ▶ The error limits the use of these methods at ultra-thin layers. ▶ Increased image resolution for an original image will decrease the error. ▶ The CFTM and GPA methods are well matched.