Microstructure and hydrogen impermeability of titanium nitride thin films deposited by direct current reactive magnetron sputtering

Microstructure and hydrogen impermeability of titanium nitride thin films deposited by direct current reactive magnetron sputtering

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 688, Part A, 15 December 2016, Pages 44-50

Tong Zhou, Dawei Liu, Ying Zhang, Taoyuan Ouyang, Jinping Suo,