Micro viscous flow processing of Fe-based metallic glassy particles

High strength micro gears were made with Fe-based metallic glass as an example of high accuracy micro parts. We proposed a novel micro viscous flow processing method for metallic glasses that have low thermal stabilities. The compressive deformation of single particles was well described by a simple model. The proposed process may clear the way for a new age of micro component fabrication in many fields including medical instrumentation, functional MEMS, and magnetic devices.