FeCoHfN thin films fabricated by co-sputtering with high resonance frequency

▶ Resonance frequency in FeCoHfN thin films can be driven beyond 6 GHz by using co-deposition technique where the deposition angle is varied. ▶ The dynamic anisotropy field, resonance frequency, frequency linewidth, damping factor and dynamic permeability are also discussed in conjunction with static magnetic properties. ▶ The discrepancy between static and dynamic anisotropy fields is interpreted within the framework of Hoffman's ripple theory.