Self-assembled tungsten oxide nanowires by electron beam assisted rapid thermal annealing

WO3 nanowires were fabricated using a novel electron beam assisted rapid thermal annealing process. The tungsten oxide nanowires were grown by e-beam evaporation of tungsten in oxygen environment with nickel as the catalyst. The substrate was annealed using a raster scanned electron beam (3 keV). The resulting changes in surface morphology, oxidization state and elemental composition of WO3 nanowires were investigated systematically.