Design of carbide-based nanocomposite thin films by selective alloying

This paper reviews a series of studies on alloying of sputtered TiC coatings with weak carbide-forming metals, Me, such as Al, Fe, Ni, Pt and Cu. Metastable solid solutions with Me on the Ti sites are easily obtained by magnetron sputtering at low temperatures (< 300 °C). First principles density functional theory (DFT) calculations of such carbides show that a driving force exists to remove carbon from the structure as an alternative and kinetically more favourable route compared to Me precipitation. This leads to a situation where additional control of the phase composition is given by annealing: both direct influence during film growth, as well as through subsequent annealing. Thus, alloying of the nanocomposite with weak carbide-forming metals can be used to tune many mechanical, electric and magnetic properties of a carbide-based nanocomposite film.