کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10668201 | 1008345 | 2011 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Preparation of a-C:H/a-C:H:Si:O and a-C:H/a-C:H:Si multilayer coatings by PACVD
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Preparation of a-C:H/a-C:H:Si:O and a-C:H/a-C:H:Si multilayer coatings by PACVD Preparation of a-C:H/a-C:H:Si:O and a-C:H/a-C:H:Si multilayer coatings by PACVD](/preview/png/10668201.png)
چکیده انگلیسی
Carbon based multilayer coatings were prepared by plasma assisted chemical vapor deposition (PACVD) using methane (CH4) and hexamethyldisiloxane (HMDSO) or methane and tetramethylsilane (TMS) as precursors. These coatings were deposited in a modified plasma nitriding plant operated at relatively high working pressures of 20Â Pa. The multilayer design consisted of a-C:H and a-C:H:Si:O or a-C:H and a-C:H:Si single layers, respectively. The number of single layers and the material of the top layer were varied at constant total coating thicknesses. These multilayer coatings were investigated with regard to their morphology and composition as well as indentation hardness, abrasive wear, lubricant free friction and wetting behavior via contact angle measurements. The multilayer coatings exhibited lower wear rates and higher hardness values than a-C:H:Si:O or a-C:H:Si single layers and lower friction coefficients than pure a-C:H coatings under unlubricated test condition. Utilizing duplex processes, combining plasma nitriding pre-treatment and a following coating deposition, the adhesion of the multilayer coatings on high speed and cold working steel substrates could be considerably improved.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 206, Issue 4, 15 November 2011, Pages 623-629
Journal: Surface and Coatings Technology - Volume 206, Issue 4, 15 November 2011, Pages 623-629
نویسندگان
Klaus Bewilogua, Ingmar Bialuch, Hartmut Ruske, Kai Weigel,