Deposition and structure characterization of carbon films prepared at atmospheric pressure by plasma jet

► The carbon coatings were deposited by plasma jet at the atmospheric pressure. ► The growth rate and structure strongly depends on the deposition parameters. ► The carbon films with the highest microhardness (7.1-9.3 GPa) were deposited at 0.005 m. ► The increase Ar/C2H2 ratio and distance increases the H and O content in films.