Chemistry, phase formation, and catalytic activity of thin palladium-containing oxide films synthesized by plasma-assisted physical vapor deposition

► Physical vapor deposition methods allow the synthesis of Pd based oxides. ► Mixtures of Pd and PdO activate the combustion of methane. ► Metallic Pd0.6Pt0.4 and Pd0.4Pt0.6 alloys are inactive for the combustion of methane. ► Preparation of Zr4Pd2O by magnetron sputtering. ► Phase formation and evolution.