Optimization of a container design for depositing uniform metal coatings on glass microspheres by magnetron sputtering

For testing the system first copper was used as a target material, which was then replaced by platinum since the glass microspheres are used for a catalytic application. The film thickness on the spheres was determined by optical absorption and matches well with the thickness calculated for the special vessel geometry. Additionally it is shown that the glass microspheres can be coated with a uniform layer by magnetron sputtering whereas coatings produced by a chemical deposition process are not continuous.