Ion beam nanopatterning and micro-Raman spectroscopy analysis on HOPG for testing FIB performances

► Highly oriented pyrolytic graphite surface is bombarded using a focused ion beam. ► Raman spectroscopy is used to propose a new protocol to test focused ion beam optics. ► Scattering diameter of the ions on HOPG surface is experimentally obtained. ► Optical limitations of the ion column in fast writing speed are discussed. ► Small level of modifications is considered for changing graphene conductive properties.