Microstructural and optoelectronic properties of polycrystalline InP films deposited by RF magnetron sputtering

► Polycrystalline InP films were deposited by RF magnetron sputtering technique. ► The role of substrate temperature on composition, structural, electrical and optical properties is reported. ► Conical shaped grain growth was observed in the films. ► Electron backscattered diffraction and Raman scattering techniques were used for microstructural characterization. ► Correlation between structural, microstructural, electrical and optical properties are presented.