Vapor-liquid-solid growth route to AlN nanowires on Au-coated Si substrate by direct nitridation of Al powder

► We fabricated AlN nanowires with uniform diameter via VLS growth mechanism. ► We affirmed VLS growth mechanism by the convictive characterizations. ► VLS-generated condition for the growth of AlN nanowires was explored. ► A thin Au film on Si substrates and low growth temperature are required. ► VS growth mechanism is non-selective for preparing AlN nanomaterials.