Growth of BiFeO3/SrTiO3 artificial superlattice structure by RF sputtering

► BiFeO3/SrTiO3 (BFO/STO) superlattices structure was fabricated with RF sputtering. ► X-ray result shows high quality of BFO/STO superlattices structure. ► Largest remanent polarization (Pr) occurs at deposition temperature 600 °C. ► Ferroelectric properties are highly correlated with lattice strain. ► Crystalline and interface quality also affect ferroelectric properties.