Quantum cascade laser-based photoacoustic spectroscopy of volatile chemicals: Application to hexamethyldisilazane

The use of photoacoustic spectroscopy and mid-infrared quantum-cascade lasers (QCLs) for the detection of hexamethyldisilazane (HMDS) is reported. A detection limit of 200 parts in 109 is found using a Fabry-Perot QCL operated at 8.4 μm in pulsed mode and a photoacoustic cell equipped with four electret microphones. The laser multimode spectrum matches the range of the N-H bending absorption band of HMDS. Further improvements to reach lower detection limits are discussed.