Pd doped WO3 films prepared by sol–gel process for hydrogen sensing

The sol gel method was employed to prepare peroxopolytungstic acid (P-PTA). Palladium chloride salt was dissolved in the sol with different Pd:W molar ratios and coated on Al2O3 substrates by spin coating method. XRD and XPS techniques were used to analyze the crystal structure and chemical composition of the films before and after heat treatment at 500 °C. We observed that Pd can modify the growth kinetic of tungsten trioxide nanoparticles by reducing the crystallite size and as a result can improve hydrogen sensitivity. Resistance-sensing measurements indicated sensitivity of about 2.5 × 104 at room temperature in hydrogen concentration of 0.1% in air. Considering all sensing parameters, an optimum working temperature of 100 °C was obtained.