Synthesis of electro-deposited ordered mesoporous RuOx using lyotropic liquid crystal and application toward micro-supercapacitors

Synthesis of ordered mesoporous RuOx electrodes was conducted by electro-deposition using a lyotropic liquid crystal template method with Ti substrates and subsequent electro-oxidation. The obtained ordered mesoporous Ru metal was characterized by XRD, TEM and electrochemical measurements in 0.5 M H2SO4. After electro-oxidation by potential cycling, the ordered mesoporous RuOx afforded specific capacitance of ∼400 F (g-Ru)−1. A micro-supercapacitor with ordered mesoporous RuOx was fabricated by controlled electro-deposition of ordered mesoporous RuOx on an inter-digitated array electrode (IDA; 10 μm electrode width, 5 μm gap and 65 × 2 electrodes). This micro-supercapacitor exhibited good capacitive property with maximum specific capacitance of 12.6 mF cm−2 and specific energy of 12.5 Wh (kg-Ru)−1 based on the mass of the deposited material.

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► Ordered mesoporous Ru was electrochemically prepared via liquid crystal templating.
► Electro-oxidation resulted in ordered mesoporous RuOx with ∼400 F g−1.
► Deposition of mesoporous Ru on μ-electrodes with 5 μm gap was achieved.
► RuOx micro-supercapacitor had specific capacitance of 12.6 mF cm−2.
► RuOx micro-supercapacitor had specific energy of 12.5 Wh kg−1.