Me3SiCC-CMeCH2 copper(I) β-diketonates: Synthesis, solid state structure, and low-temperature chemical vapour deposition

The synthesis of diverse ene-yne copper(I) β-diketonates (β-diketonate = acac, dbac, hfac) is described. Preliminary studies of one sample as CVD precursor in the deposition of copper onto TiN-coated oxidised silicon wafers is reported as well.