کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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1431109 | 1509189 | 2008 | 8 صفحه PDF | دانلود رایگان |

The determination of fluid flows in silicon microchannels is important for the design of microfluidic systems. In this paper, experimental investigations on the characteristics of low fluid flows (few μl h− 1) in silicon trapezoidal microchannels (21 μm in depth, length and width ranging from 200 to 440 mm and 58 to 267 μm, respectively) are presented. The test-devices have been fabricated using micromachining technologies. A double KOH etching process has been used to achieve microchannels in (100)-oriented silicon wafers as well as deep in-plane cavities used for capillary connections. Silicon has been finally anodically bonded on Pyrex substrates. The experimental set-up, based on the measurement of a differential pressure and a liquid–air interface displacement in a gauged tube, is fully detailed in terms of fluidic connections and measurement principle. The experimental results are in good agreement with the Navier–Stokes theory, solved by a simple iterative method. However, finite element modelling has been used to study complex 3D problems that were found in the devices and the experimental set-up. Finally, we propose abacuses for three different channel cross-sections that may be used to easily compute the flow in a microchannel.
Journal: Materials Science and Engineering: C - Volume 28, Issues 5–6, 1 July 2008, Pages 910–917