کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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1459148 | 989590 | 2016 | 7 صفحه PDF | دانلود رایگان |
The effect of the oxygen partial pressure on the conductivity of (Ga, P) co-doped ZnO thin films (ZnO:Ga0.01P0.02, ZnO:Ga0.01P0.04) was investigated. The thin films were grown by using the pulsed laser deposition (PLD) method. As the oxygen partial pressure increased from 1 mTorr to 200 mTorr, the electron carrier concentration of the ZnO:Ga0.01P0.04 thin films decreased. Above 200 mTorr, however, the electron carrier concentration increased and a transition from n-type to p-type conductivity was observed. On the other hand, in the case of the ZnO:Ga0.01P0.02 thin films, their electron carrier concentration continuously decreased as the oxygen partial pressure increased from 1 to 500 mTorr, showing the typical n-type semi-conductive characteristics. The X-ray photoelectron spectroscopy (XPS) and secondary ion mass spectroscopy (SIMS) analyses were used to characterize the n-type to p-type conductivity transitions with increasing oxygen partial pressure.
Journal: Ceramics International - Volume 42, Issue 3, 15 February 2016, Pages 4136–4142