کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1474166 | 991077 | 2013 | 4 صفحه PDF | دانلود رایگان |

The mechanical properties of ceramics films at the sub-micron, even nanometer length scale have attracted increased attention due to the high-speed development of microelectronic technology. In this work, nano-indentation hardness as a function of the different individual layer thickness has been measured and investigated in the sputtered Al/Si3N4 multilayers with different indenters (Vickers and Brinell). For this ceramics/metal multilayers system, the hardness of the multilayers increases with decreasing individual layer thickness from 500 nm to 100 nm and from 50 nm to 10 nm, indicating a significant size effect. At the same time, changes in the deformation behavior may be controlled by different deformation mechanisms for submicron scale and nanometer scale.
Journal: Journal of the European Ceramic Society - Volume 33, Issue 12, October 2013, Pages 2355–2358