کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1474166 991077 2013 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Nanoindentation of nano-Al/Si3N4 multilayers with Vickers and Brinell indenters
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Nanoindentation of nano-Al/Si3N4 multilayers with Vickers and Brinell indenters
چکیده انگلیسی

The mechanical properties of ceramics films at the sub-micron, even nanometer length scale have attracted increased attention due to the high-speed development of microelectronic technology. In this work, nano-indentation hardness as a function of the different individual layer thickness has been measured and investigated in the sputtered Al/Si3N4 multilayers with different indenters (Vickers and Brinell). For this ceramics/metal multilayers system, the hardness of the multilayers increases with decreasing individual layer thickness from 500 nm to 100 nm and from 50 nm to 10 nm, indicating a significant size effect. At the same time, changes in the deformation behavior may be controlled by different deformation mechanisms for submicron scale and nanometer scale.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of the European Ceramic Society - Volume 33, Issue 12, October 2013, Pages 2355–2358
نویسندگان
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