کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1483579 1510503 2009 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Study of the morphological change of amorphous ITO films after temperature–humidity treatment
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Study of the morphological change of amorphous ITO films after temperature–humidity treatment
چکیده انگلیسی

Amorphous indium tin oxide (ITO) thin films have been deposited on silicon and Corning 7059 glass substrates at room temperature (RT) and at 75 °C by direct-current magnetron sputtering method. After exposure of the two kinds of samples to the temperature–humidity (T–H) test, we find that there are two different types of circular structures are formed. RT ITO films are composed of granules, and 75 °C ITO films are composed of several different parts which have different Sn and In concentrations. Metallic ion concentration corrosion cells are used to explain the phenomena.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Non-Crystalline Solids - Volume 355, Issues 52–54, 15 December 2009, Pages 2682–2687
نویسندگان
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